On the mechanisms affecting aluminum transport and incorporation efficiency during AlGaN MOVPE | Yakovlev | EWMOVPEX. 10th European Workshop on Metalorganic Vapour Phase Epitaxy

On the mechanisms affecting aluminum transport and incorporation efficiency during AlGaN MOVPE

E.V. Yakovlev, R.A. Talalaev, A.N. Vorob’ev, Yu.N. Makarov

DOI Code: 10.1285/i9788883050088p283

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